Used CANON FPA 6000 AS4 #293753688 for sale
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ID: 293753688
Wafer Size: 8"
Vintage: 2004
ArF Scanner, 8"
Reticle, 6"
Cassette: Left
SCSI Hard Disk Drive (HDD)
Wafer loader type: SCH Robot
Reticle alignment: EXA Scope unit
Chamber type: FPA-6000-ASA
CCD
Autofocus mode
CYMER Laser, currently non-functional
PC: HP B2600
2004 vintage.
CANON FPA 6000 AS4 is a state-of-the-art wafer stepper designed for advanced lithography techniques. This innovative machine utilizes advanced lithography techniques, such as multiple exposure projection, to create high-resolution masks. FPA 6000 AS4 is capable of delivering micro-line patterns of up to 1.0 μm over large-area fields. CANON FPA 6000 AS4 features a maximum working area of 6,000 x 6,000 μm and a 5-step zoom equipment, allowing for precise exposure of the wafer. Additionally, it has a high-powered illuminator, two-dimensional scan and a variable-angle projection system to reduce aberrations and distortions. The machine also has a high-throughput reflective imaging mode for the production of advanced optical elements. FPA 6000 AS4 has several advanced features that help to ensure quality mask production. It has built-in autofocus and anti-collimation systems to precisely align the masks before exposure. Additionally, its advanced laser optics ensure accurate high-resolution mask patterns. CANON FPA 6000 AS4 also has a built-in automatic exposure leveling unit that enables uniform exposure of the wafer. FPA 6000 AS4 has a throughput of up to 500 wafers per hour, making it one of the fastest wafer steppers available. Its high-speed rotation and two-dimensional scanning ensures quick and accurate production of a wide variety of patterns. Additionally, its user-friendly interface makes it easy to program and operate. CANON FPA 6000 AS4 is a highly reliable and durable machine. It is constructed with a rigid and dustproof design that prevents contamination and wear. The machine also has a low failure rate compared to other wafer steppers of a similar class. Furthermore, its built-in maintenance machine makes it easy to check and diagnose any issues with the machine. Overall, FPA 6000 AS4 is a highly advanced wafer stepper that offers high-precision lithography mask production. Its advanced feature set, high-throughput, reliability and durability make it an ideal choice for advanced lithography applications.
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