Used CANON FPA 6000 AS4 #293753702 for sale
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ID: 293753702
Wafer Size: 8"
Vintage: 2003
ArF Scanner, 8"
Reticle, 6"
Cassette: Left
SCSI Hard Disk Drive (HDD)
Wafer loader type: SCH Robot
Reticle alignment: EXA Scope unit
Chamber type: FPA-6000-ASA
CCD
Autofocus mode
PC: HP B2600
2003 vintage.
CANON FPA 6000 AS4, is an advanced wafer stepper designed to facilitate the imaging process in photolithography. With a 5.8μm image size accuracy, a 1.6nm overlay accuracy, and a fast imaging process rate of up to 100 wafers per hour, the machine is suitable for high volume, high throughput semiconductor production. The machine is equipped with a high-precision, low-load six-axis robot for rapid and accurate stage movement, and has a vertical vibration compensation design to ensure can yield optimal results when printing multiple chips on a single wafer. In addition, the machine is equipped with a high-performance excimer laser light source, which ensures high resolution images with a minimum amount of exposure time. This makes the machine suitable for high volume and high throughput production. FPA 6000 AS4 also features a reliable liquid crystal beam-shaping equipment, providing highly accurate beam deflection control. This lets the machine process with high precision, and helps to reduce any potential form errors. The machine also provides automated focus control, so that printed images can be produced accurately and quickly, regardless of the stage and substrate conditions. In addition, it features an automated alignment system, allowing users to quickly adjust the beam position before printing, improving the resolution and accuracy of the images printed. In addition to its imaging capabilities, the unit also provides advanced pattern editing tools, allowing users to design advanced patterns with finer details. Furthermore, pattern placement can be tracked accurately, so that the printed pattern is accurate, regardless of the stage position. Finally, the machine is equipped with a robust data management machine, providing the user with the ability to store a variety of data, including parameters, recipes and measurement results. This makes it easy to manage multiple wafers and manage the lifecycle of each wafer. In summary, CANON FPA 6000 AS4 is an advanced wafer stepper capable of delivering high precision, high throughput imaging for photolithographic processes. With its fast imaging process rate and reliable design, the machine is ideal for any photolithographic environment, especially those requiring high volumes of product.
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