Used CANON FPA 6000 AS4 #293815444 for sale
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ID: 293815444
Deep Ultraviolet (DUV) Scanners
Argon‑Fluoride (ArF) laser
Damaged parts: cymer laser, chiller
WS counter mass water leak
Stage leak
Module: PH.
CANON FPA 6000 AS4 is a top-of-the-line wafer stepper designed to enable high-precision lithography used in the production of semiconductor devices. The machine is equipped with a special high-resolution 4-kW laser scanner to offer superior accuracy and uniformity. The machine features a high-speed alignment equipment that uses multiple detectors to detect distortion of the scanning line and adjust the alignment in the X and Y axes. The dual CCD cameras ensure precise overlay alignment with a subpixel accuracy. Furthermore, the machine offers superior process control using advanced extended field-matching and an automated focus-tracking system. These systems enable precise lithography imaging of even the tiniest structures on fragile wafers. In addition, the auto-shutter unit ensures uniform throughput and non-uniform exposure of all masking levels. The machine is also equipped with a long-life scan encoder for high-precision scanning and an extra-stable wafer handling machine designed with patented technology. These features enable superior manipulation and alignment of even the slightest patterns on the wafer surface. The advanced software also provides additional process control and fine-tuning of the imaging process. The machine also offers superior wafer bonding capabilities with CANON AMF-FT (Auto Matching Functional Free Topology). This unique feature offers superior bonding parameters with a minimization of masking distortion and a guarantee of highly parallelized alignment. FPA 6000 AS4 is the highest-end wafer stepper available today, offering unparalleled accuracy and uniformity. Advanced process control, superior scanning, and superior wafer bonding capabilities make this the ideal machine for the successful production of high-end devices.
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