Used CANON FPA 6000 ES5 #9253683 for sale

CANON FPA 6000 ES5 is a wafer stepper manufactured by CANON Inc. that provides precision placement and patterning of advanced semiconductor device layers at a high rate of accuracy. It has a built-in advanced lithography equipment ideal for processes such as semiconductor device fabrication and Deca exposure. The stepper uses double exposure for improved alignment and precision placement. It also has a selectable operation environment that can handle varying processing conditions, such as high-temperature and variable gas atmosphere. FPA 6000 ES5 is equipped with advanced features that enable efficient and precise wafer-level patterning. These features include an advanced laser interferometer system, an air knife unit, and a high-precision temperature-controlled resist development machine with average placement accuracy within 2µm. Its high resolution auto-focusing tool provides an optimum exposure process at any given position. The stepper has a 6k-pixel array image sensing unit that provides high-resolution patterning capability. A high speed auto-shutter with low-noise shutter function is also incorporated, which increases the throughput of the asset. The stepper has a maximum resolution of 5 microns and is capable of processing 6 inch and 8 inch wafers. CANON FPA 6000 ES5 is designed for low power consumption with a low water vapor content. Its advanced environmental control model enables efficient performance in process temperatures ranging from 20° to 30°C, with no need for additional cooling. The machine also provides accurate Control of exposure latitude to tightly regulate the pattern resolution. The stepper is designed with a variety of communication interfacing that include Ethernet, USB, and RS-232, making it ideal for debugging and maintenance operations. Furthermore, its integrated inspection equipment ensures accurate placement and detection of errors. FPA 6000 ES5 is also designed for easy maintenance with a clean interface, reduced calibration times, and advanced monitoring features.