Used CANON FPA 6000 ES6 #9210240 for sale

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Manufacturer
CANON
Model
FPA 6000 ES6
ID: 9210240
Wafer Size: 12"
Vintage: 2005
KrF Scanner, 12" 248 nm Loading config: Right hand loader In-line with TEL Clean Track Lithius Notch type, 12" (LCP Wafer chuck equipped) R-Type, Type X Auto feeder LITHIUS Type Coater developer R-Type Inline direction R-Type: Wafer thermal controller plate, 12" (WTC) L-Type: Open cassette, 12" CANON Standard booth unit Reticle changer (Reticle SMIF changer unit) Reticle barcode reader: 6" Pellicle particle checker type: 6" (Pellicle height 5mm) GIGAPHOTON G41K3-1H Excimer laser RH Type: Delivery optics Front side e-console kit Signal tower type: 3 Colors Power: 200 AC, 3 Phase 2005 vintage.
CANON FPA 6000 ES6 wafer stepper is a precision optical imaging tool that uses advanced technology to allow users to accurately examine, inspect, and process a wide range of substrates, including complex materials and structures. This makes it the perfect tool for semiconductor fabrication, research, and development. CANON FPA-6000 ES6 is extremely precise, providing a high-speed imaging rate of up to 1.2 seconds per field of view. Its six individual exposure heads contain a variety of lenses and bevel optics to allow for flexibility in substrate exposure, making it ideal for process maturation and defect inspection. This wafer stepper offers significant imaging acceleration with its High Dynamic Speed Imaging Mode, which provides up to 175X exposure speedup. It also has a wide spectrum illumination source, featuring wavelengths from ultra violet to infrared, including both visible and invisible light for superior imaging. This enables high resolution and contrast measurements, making it ideal for various applications. FPA 6000 ES6 also offers an ergonomic environment with its automated wafer handling and pre-alignment systems. These allow the user to quickly and accurately move wafers into and out of the stepper chamber, streamlining the process even more. This is especially useful for high-throughput work. The equipment is also highly efficient, boasting a low-energy lighting system that consumes 90% less energy than traditional imaging systems. That's combined with an enhanced cooling unit that keeps temperatures within their optimal range at all times. This helps to extend the machine's lifetime while also cutting back on costs. Finally, FPA-6000 ES6 offers a range of advanced features designed to ensure top performance and efficiency. These include an automated calibration tool, an auto-focus asset that eliminates manual focus adjustments, and a patented low-density particle beam (LDPB) that enhances image consistency and contrast. All of these features contribute to the model's overall reliability and productivity.
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