Used CANON FPA 6000 ES6a #9198402 for sale

It looks like this item has already been sold. Check similar products below or contact us and our experienced team will find it for you.

Manufacturer
CANON
Model
FPA 6000 ES6a
ID: 9198402
Wafer Size: 12"
Vintage: 2013
KRF Scanner, 12" SMIF Component: GEM Wafer OF type: Notch Inline flow: Right W/L & R/L: RL Library: Center PPD Type: PPD2 GIGA G41K3-H Laser Stage: Scan speed: 250mm/sec Chuck: Pin Components: PO Module W/S Module R/S Module Booth1 PSR W/S Chuck Laser CPSU UNT 1 CPSU UNT 2 2013 vintage.
CANON FPA 6000 ES6a is a wafer stepper used in the manufacture of microcircuits, photomasks, and other related products. It utilizes a large field of view (77mm x 78mm) to ensure that devices can be accurately imaged, and it has a high resolution of 0.45um for pinhole inspection. This equipment is capable of double-sided patterning and double-sided alignment, enabling multilayer devices to be fabricated efficiently. CANON FPA 6000ES6A features a comprehensive overlay accuracy with a combination of Point Alignment and Free Alignment compensations. Furthermore, wavelength scanning is engineered to optimize image enhancement. The lens used in FPA-6000ES6A is designed such that it offers supreme performance by providing a sharp imaging field with excellent contrast and minimal flare. Moreover, covering a large range of wavelengths, this lens ensures that diverse device needs are met. The ES6a is engineered for a maximum throughput of an impressive 180wspm. With built-in focusing and pattern positioning sensors as well as a Micromirror Device fitted with a high-resolution digital graphics display, CANON FPA-6000ES6A enables optimum process control. FPA 6000 ES6a is designed to provide a cost-effective alternative to the conventional double-reflection mirror system. It's equipped with an electrostatic 100kHz scan mirror, reduces vibration to increase throughput speed and reduces downtime. Additionally, the ES6a entails a Lens Cap Alignment function, which is designed to reduce the need for frequent optimizing and shortens the adjustment cycle. CANON FPA 6000 ES 6 A also has a high sensitivity photomask-to-wafer alignment system. The primary benefit provided by the alignment system is that it ensures high accuracy movement from targeted position-to-position at sub-angular accuracy. Furthermore, to ensure minimal flare, the wafer stepper implements an imported monochrome monitor for high-precision visual control. Overall, FPA 6000 ES 6 A is a highly advanced, efficient and reliable wafer stepper. Its large field of view, impressive resolution, overlay accuracy, and wide range of capabilities make it an ideal solution for the high-precision manufacture of microcircuits, photomasks and related items.
There are no reviews yet