Used CANON FPA 6000 ES6a #9210238 for sale
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ID: 9210238
Wafer Size: 12"
Vintage: 2005
Fine pattern aligner, 12"
KrF Scanner: 248nm
Notch wafer
LCP Wafer chuck
Auto feeder: L Type, Type X
Loading config: Left hand loader
Coater / Developer: LITHIUS Type
Inline direction: L Type
L-Type wafer thermal controller plate (WTC), 12"
R Type open cassette, 12"
CANON Standard booth unit
Reticle changer
Reticle SMIF changer unit
Reticle barcode reader, 6"
Pellicle particle checker, 6"
Gigaphoton G41K3-1H excimer laser
RH Type delivery optics
Front side only e-Console kit
Signal tower: (3) Colors type
Power: 200 AC, 3 Phase
2005 vintage.
CANON FPA 6000 ES6a is a sophisticated wafer stepper used in semiconductor manufacturing and photolithography applications. This high-end machine features simple linear indices, ultra-fast low-die processes, and a low-abrasion index. The stepper is capable of working with a wide range of wafers, ranging from 3-12 inches in diameter, and can accommodate a range of thicknesses, from 2mm to 10mm. At the heart of CANON FPA 6000ES6A is a highly precise optical assembly which uses laser diode scanning technology to accurately transfer patterns and three-dimensional shapes onto the wafer surface. The device is capable of positioning and aligning pieces at a precision of up to 1 micron, making it ideal for fabricating highly detailed and intricate designs. FPA-6000ES6A includes a range of advanced features and processes, including a two-stage inspection equipment, and a two-dimensional wafer alignment technique. Furthermore, advanced discretization techniques allow the machine to precisely and accurately place geometries on specified each time. CANON FPA 6000 ES 6 A also features a high-speed wafer handling system, allowing for rapid loading and unloading of wafers, which improves cycle times and increases productivity. Additionally, the unit incorporates several advanced drying techniques to protect exposed areas from non-uniform wetting and other contaminants. CANON FPA-6000ES6A is constructed of special, durable materials to protect the interior components from dust, debris, and other environmental factors. The entire unit is designed for easy access and maintenance, making it ideal for long-term use. In addition to its cutting-edge features, FPA 6000ES6A features a comprehensive user interface, integrated with a range of software packages, which enables convenient, real-time monitoring of machine performance. Furthermore, the intuitive software allows users to quickly and easily adapt the tool to specific needs. Overall, FPA 6000 ES6a is an impressive wafer stepper, boasting an advanced range of features and an intuitive user interface. Its precision, accuracy, and robust design make it ideal for diverse photolithography and semiconductor manufacturing applications.
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