Used CANON FPA 6000 ES6a #9293799 for sale

CANON FPA 6000 ES6a
Manufacturer
CANON
Model
FPA 6000 ES6a
ID: 9293799
Wafer Size: 8"
Vintage: 2007
KrF Scanner, 8" 90 nm 2007 vintage.
CANON FPA 6000 ES6a Wafer Stepper is a state-of-the-art ultraviolet lithography system used in the manufacture of integrated circuits (ICs). The machine combines advanced laser optics, a high-precision 6-axis stage, and an automated cassette transport to increase throughput and reduce wafer processing time. The machine is capable of producing features as small as 15 nanometers and is well-suited to the production of high-density integrated circuits, memory devices, and optoelectronic components. CANON FPA 6000ES6A features a 193nm ArF laser as the excitation source, allowing for much higher resolution than KrF lithography, which is the industry standard. The laser is focused and directed using a high-precision optical collimator and a 6-axis mirror steering assembly, which is capable of accurately positioning the beam to within nanometer specification. The stage features an integrated high-resolution laser scanner, enabling it to accurately settle the wafer to the proper location before the exposure. The machine is also equipped with an automated cassette transport system, which allows for rapid loading and unloading of wafers into the system. This allows for multiple wafers to be processed in each cycle, leading to a significant increase in throughput. Furthermore, the transfer mechanism is equipped with a wafer flipper, making it possible to quickly transfer wafers from the cassette to the stage and back again. Overall, FPA-6000ES6A Wafer Stepper is an effective and reliable tool for semiconductor processing. The combination of its advanced laser optics, 6-axis stage, and automated cassette transport gives it exceptional wafer processing capabilities. It is well-suited for producing complex, high-density ICs and memory devices, making it an invaluable tool in the modern semiconductor manufacturing industry.
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