Used CANON FPA 6000 ES6a #9296965 for sale

CANON FPA 6000 ES6a is a wafer stepper that is a part of CANON ES Equipment development series, ES for Efficient Solutions. CANON FPA 6000ES6A wafer stepper is built for efficient and accurate wafer-level device production. It has a minimum feature size of 0.25 microns and a mechanical alignment accuracy of 0.5 microns. The high throughput and repeatability makes it suitable for a variety of device fabrication processes including high precision ICs, passive components, MEMS and biosensors. The stepper controller can store up to 30 process recipes allowing users to switch between different device components, processes, and substrates quickly and efficiently. The stepper features a moveable 5-axis Mask Table and substrate stage, The Mask Table is designed to accommodate various mask sizes and is capable of aligning the mask directly with the substrate for high precision alignments. The Moveable Substrate Stage allows substrates of up to 300mm to be loaded and securely held in place. FPA-6000ES6A features a new Fluoro Scanner that utilizes a laser wavelength to achieve faster exposure times, resulting in higher throughput. It also offers a variety of exposure modes including single wafer exposure, multi-area exposure and laser scan exposure. The Powerful Imaging System reduces patterning errors so that high resolution patterns can be achieved. The stepper includes a Two Stage Amplitude Unit that allows users to select from 2 different exposure energies that can be targeted to specific devices. The stepper also offers advanced automation features such as an Auto Process Start that allows users to start process recipes without operator intervention. The Auto Focus module assists in optimally positioning the mask and substrate for each exposure. The Auto Reticle Change feature allows users to quickly change reticles for increased throughput and reliability. The Auto Reticle Cleaning Machine allows users to keep the reticles free of contamination and dust. Overall, FPA 6000 ES 6 A Wafer Stepper is a powerful and efficient solution for the fabrication of high precision devices. It offers a fast throughput, repeatability, and a high level of control with easily programmable software. It also features a range of advanced automation and advanced imaging capabilities, making it an ideal choice for wafer-level device production.