Used CANON M31016 #9409288 for sale

CANON M31016 is a top-level wafer stepper often used in the semiconductor fabrication process. It is an advanced, history-making system that combines advantages of both step-and-scan systems and traditional step-and-repeat systems. M31016 is equipped with a powerful Wyko anti-reflection coating stage, which reduces photomask and wafer reflectivity for improved image quality. Thanks to its improved illuminator design, its Precision Point Positioning technology enables a resolution of 6 nm and accuracy of 0.1 µm. With its 5-axis stage, it ensures a larger field of view. Its external scanner offers additional motion control with an accuracy down to 0.001 mm, enabling CANON M31016 to handle wafers wider than 8 inches with ease. M31016 is also capable of processing thin wafers of up to 0.25mm, with an accuracy of 0.02 µm. It offers high-end exposure times up to 135 ms and its excellent resolution of 1.2 nm makes it ideal for applications like photomask printing and reverse engineering. Its sophisticated error prevention architecture ensures repeatable, high-precision results time after time, backed up by its advanced video inspection system that provides real-time feedback on tool operation. CANON M31016 includes comprehensive maintenance and calibration programs, allowing users to improve tool performance and reduce system downtime. An efficient Monitoring Algorithm for OPC (model-based process correction) ensures improvements in Lithography Hotspot Contrast and improves OPC precision through rapid convergence to increase productivity. With its excellent automation capabilities, M31016 is able to significantly reduce personnel input, allowing for higher productivity with fewer resources. CANON M31016 also includes a unique Geometrically Declared Site Feature (GDSF) software which helps to reduce misalignment errors and maintains alignment accuracy. A specialized data analysis tool, the 5D Architect, is also included, which enables users to gain detailed data visualization in the GDSF format and optimize the overall production process. In conclusion, M31016 is a top-level wafer stepper ideal for semiconductor fabrication. Its advanced features ensure high-precision results with minimal personnel input, making it a powerful and efficient tool.