Used GCA 6300B #9350318 for sale
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ID: 9350318
Wafer Size: 6"
DSW Wafer stepper, 6", parts system
With environmental chamber
G-Line lamp
Control panel
Wire
Vibration isolators
Test reticle
Spare parts
Manuals.
GCA 6300B is a resist stepper manufactured by GCA Corporation, a company that specializes in the design and production of photolithography machines. It is a medium-field step-and-scan lithography equipment that utilizes a wafer stepper to expose semiconductor wafers with integrated circuits. 6300B is designed to meet the rigorous requirements of submicron photolithography, exceeding the accuracy and resolution of earlier step-and-scan lithography machines. The system utilizes advanced imaging technology to provide superior process control, increasing durability and throughput in the chip manufacturing process. At the heart of the machine is an advanced high-resolution lens unit, which provides outstanding image quality with extreme consistency. This is further supplemented by an automated alignment machine for high-precision, high-speed wafer alignment, ensuring precise production of complex integrated circuits. GCA 6300B is further equipped with an industry-leading wafer stepper tool. This asset consists of a highly accurate, closed-loop control wafer stage, providing precise control over wafer positioning and scanning. In addition, the machine employs precise stepper motors that accurately scan the wafer surface with laser diodes for precise exposure. This ensures precise control and positioning of the mask image on the wafer. Another key feature of 6300B is its advanced automated metrology model, which utilizes a vision equipment to monitor the uniformity and fidelity of the exposed pattern. This is further supplemented by a focus system that tracks the focal plane to ensure that the image is rendered accurately and distortion-free. Further, the unit is designed with the ultimate in scalability, allowing it to be upgraded to handle larger wafer sizes up to and greater than 200 mm. All together, GCA 6300B is an advanced wafer stepper machine that is capable of producing high-resolution, complex integrated circuits with incredible precision. Its closed-loop wafer stage and stepper motors ensure precise registration of images and positioning, while its advanced metrology systems provide error checking and analysis. Ultimately, 6300B is an excellent medium-field lithography tool for high-precision submicron circuit production.
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