Used GCA AutoStep 200 #293639166 for sale

Manufacturer
GCA
Model
AutoStep 200
ID: 293639166
Wafer Size: 6"
i-Line stepper, 6" 1995-1996 vintage.
GCA AutoStep 200 is a sophisticated wafer stepper developed by GCA Corporation. It is an advanced lithography tool used to transfer circuit patterns onto a surface of a wafer. The stepper uses a patented Optical Micro-Projection Display (OMPD) technology for projecting ultra-precise digital images onto the wafer. This technology minimizes imaging distortions and allows for the production of highly accurate and reliable photosensitive devices. GCA AUTO-STEP 200 equipment is equipped with a robust optical system, paired with advanced digital imaging and image processing systems. This combination provides the user with high-resolution results, excellent repeatability, and a wide range of capabilities in designing, printing on, and processing for both nanometer-scale precision features and large die devices. At the heart of the machine is its multi-stage, highly adaptable projection unit, with a minimum scanning pitch of 2.5 μm and maximum masks of 40 μm. This machine includes lenses and a patented feedback mechanism to maintain an extremely low line edge roughness and low line width error and skew across the entire image. For the highest precision jobs, AutoStep 200 offers advanced auto-correction services that can correct any optical defects, such as flare, aberration and shading. AUTO-STEP 200 also has a powerful and highly reliable exposure tool for accurately transferring circuit patterns onto the wafer. This asset features field flattening lenses, rapid scan speeds, and superior repeatability, allowing for highly accurate and complex devices to be produced. A unique exposure alignment model ensures that circuits are properly aligned on the wafer, eliminating any errors or distortions caused by misalignment. GCA AutoStep 200 is equipped with a number of other state-of-the-art features, such as an input/output port to integrate other lithography systems and processes, dust suppression options, and specialized diagnostics and monitoring options. In addition to providing the user with superior accuracy, precision, and quality results, GCA AUTO-STEP 200 is also highly efficient, offering fast set up times, large lithography steps and extended exposure times for large scale projects. Its ease of use and fast turn-around time make it a popular choice for any professional looking for a reliable, automated lithography tool.
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