Used GCA AutoStep 200 #9243635 for sale

Manufacturer
GCA
Model
AutoStep 200
ID: 9243635
Wafer Size: 8"
Wafer stepper, 8" TROPEL 2145 Lens i-Line (365 nm): 0.45 NA Field size: 21 mm With 8860 Environmental chamber Insitu probe: Probe mount stage and lens reduction Automatic Wafer Handler (AWH) (25) Cycles, 6" Automatic level wafers RMS10: (10) Reticles, 5" Maxi 2000: i-Line light source, 700 W AFS 100 Automatic focusing system MicroDFAS: Local alignment system Alignment prior stepping SmartSet: Metrology computer system and store data Single / Multiple steppers IQ Probe: Lamp position and light source Programmable Platen Control (PPC) Automatic adjust reticle load position Integrated Alignment System (IAS) Automatic digital alignment Atmospheric Compensation System (ACS) Nitrogen reduction lens.
GCA AutoStep 200 is an automated wafer stepper designed to maximize sampling efficiency and flexibility in semiconductor device fabrication. GCA AUTO-STEP 200 provides precise and repeatable substrate positioning and requires minimal user input in order to function. The device is equipped with an auto-scaling optics equipment that can process wafers ranging from 200mm to 8" in size, providing optimal exposure accuracy. The optics system is then fitted with a state-of-the-art dual sensor autofocus feature to ensure high-resolution imaging. The exposure head is capable of traversing with speeds up to 8mm/second and can be adjusted in both the X and Y-axis. AutoStep 200 is powered by GCA proprietary algorithm-based control unit. This machine ensures optimal wafer placement accuracy by predicting and correcting any potential positional errors prior to exposure. The algorithm also enables efficient exposure alignment and enables the tool to accurately increase or reduce the area being exposed. AUTO-STEP 200 includes a comprehensive suite of safety features to protect both the wafers and the user. All exposure parameters are programmable and the asset includes both hardware and software safety interlocks to ensure compliance with safety protocols. In conclusion, GCA AutoStep 200 is a powerful and reliable automated wafer stepper designed to easily process a wide range of substrates and provide precise and repeatable exposure accuracy. Its algorithm-based control model, comprehensive safety features, and dual sensor autofocus feature make it the ideal choice for device fabrication applications.
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