Used GCA XLS 7800 #9382955 for sale
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ID: 9382955
Vintage: 1992
DUV Stepper
Model number: CXLATTM01DUV
248 nm
1992 vintage.
GCA XLS 7800 is an advanced wafer stepper designed for a broad range of fabrication processes. The equipment features a state-of-the-art optical engine and high-performance XY stage to provide quick, high-accuracy step-and-repeat operations across a wide variety of substrates. XLS 7800 features a monochrome laser light source and 8-inch scans per second accelerometer-mounted laser scanner for higher throughput and improved part-to-part overlay accuracy. The beam spot size is adjustable to meet various exposure requirements, including hard contact photolithography and laser ablation. The system can handle up to 24 jobs simultaneously, and it has an easy-to-use graphical user interface for job submission and management. GCA XLS 7800 also has a high-powered, automated exposure capability in order to achieve high-precision alignments for even the most complex patterns. The high-speed and accuracy of the alignment ensures quick processing and minimal propagation errors across large substrates. The automated exposure also enables fast transitions between steps, further optimizing throughput. XLS 7800 includes an ultra-low vibration platform and a global unit controller to ensure precise and repeatable throughput. The machine ensures top-notch lithographic stability, and its auto-focus feature and efficiency enhancements increase the accuracy of all operations. The tool also offers integrated options for dielectric coating and wafer slicing, adding to its automated capabilities. In short, GCA XLS 7800 is an automated wafer stepper designed to maximize throughput and accuracy. Its state-of-the-art optics, high-performance XY stage, laser scanning, automated exposure, and integrated options for dielectric coating and wafer slicing combine to ensure quick, precise and repeatable results across large substrates.
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