Used HITACHI LD-5011iA #9130224 for sale

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HITACHI LD-5011iA
Sold
Manufacturer
HITACHI
Model
LD-5011iA
ID: 9130224
Wafer Size: 6"-8"
Steppers, 6"-8".
HITACHI LD-5011iA is a full-featured wafer stepper designed to deliver high image quality and a high degree of process uniformity. LD-5011iA has been designed with a number of key features designed to optimize lithography processes and produce consistent results. HITACHI LD-5011iA is equipped with a reduction objective lens (ROL) with a numerical lens aperture of 1.2, providing an enlarged and highly detailed image of the wafer. The microscope also features a unique focusing mechanism and low-profile trap lens balance setup to ensure that the magnification does not shift during the exposure process. The wafer stepper has the capability to handle multiple types of illumination, including both UV and visible wavelengths, enabling it to be suitable for different kinds of lithographic processes. The stepper also features a unique dual directional servo shutter mechanism, providing stable exposure times for each step of the lithographic process. The wafer stepper also features a highly precise auto focus equipment, equipped with a laser interferometer, which can accommodate a wide range of wafer heights. LD-5011iA has a maximum resolution of 1.67µm, and can accommodate a wide range of processing needs. The system also offers an optional Software Option to create a customized focus-measuring unit with automatic focus setting, allowing the user to accurately adjust the focus in a wide variety of operating conditions. The machine software also offers comprehensive feature control functions, allowing the user to customize the process. In addition, HITACHI LD-5011iA is designed to be a user-friendly stepper, offering an intuitive dialogue-driven user interface to make setting and operation easier. The wafer stepper also features a highly reliable conveying mechanism, with quick indexing and safe sample handling, enabling higher production yields. LD-5011iA is a fully automated and reliable wafer stepper that can be used for a wide range of lithographic processes. It offers a wide range of features to optimize lithographic processes and produce reliable, consistent results. With its intuitive user interface and reliable focusing, HITACHI LD-5011iA is ideal for high-volume production environments.
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