Used HITACHI LD-5011iA #9359431 for sale

HITACHI LD-5011iA Stepper is a high-speed, high precision micro-processing machine ideal for advanced semiconductor production. This wafer stepper is designed to provide superior output and flexibility in wafer processing. LD-5011iA's advanced, fully automated features include a 3-axis laser projection control equipment, which enables precise control of laser beam for pattern resolution exceeding 0.25 μm. This Laser Projection Control system offers improved placement accuracy and allows for faster processing of meta-stitching patterns. It also features a patented high-accuracy wave focus detection mechanism that prevents misalignment caused by optical distortion of the wafer. HITACHI LD-5011iA operates with a top speed of 10,000 steps per second on its 25-inch area stage for fast and precise scanning. It comes with a high-accuracy shooting control unit that allows precision scanning to be optimized across multiple field points. LD-5011iA's three-axis control machine minimizes exposure error, giving high accuracy even when multi-exposure is used. HITACHI LD-5011iA is equipped with a wafer handler capable of accommodating up to 12-inch wafers. This feature eliminates any damage or contamination due to loading of multiple wafers. The coupled wafer transfer tool also increases throughput when multiple wafers need to be processed. LD-5011iA Stepper is an ideal wafer processing solution due to its high-speed performance, superior control asset, and ultra-precise laser projection model. Its advanced automated features help to ensure fast, accurate processing of even the most complex jobs. The machine's high-performance wafer handler minimizes DownTime for loading and unloading multiple wafers. Furthermore, HITACHI LD-5011iA's advanced technology provides an edge in the manufacturing world, by allowing for faster production of precision products.