Used NIKON FX-601F #9398729 for sale

Manufacturer
NIKON
Model
FX-601F
ID: 9398729
Stepper.
NIKON FX-601F is a state-of-the-art wafer stepper designed to enable advanced lithography processes. It provides an ideal mechanism for collaborative imaging and fabrication of high-precision semiconductor devices. NIKON FX 601F utilizes advanced technological features to achieve optimal in-plane performance with high-throughput speeds and reliable operation. It offers the highest resolution exactitude of >=3-µm line/space including exceptional step-and-repeat accuracy. The stepper is capable of processing a multitude of materials, including traditional lithography based resist, binary and noble layer conditions. Furthermore, it has the ability to support a variety of wafer sizes ranging from 8- to 200-millimeter diameter, making it an ideal choice for applications needing both accuracy and high throughput. One of the primary features of FX-601F is the highly-integrated Multi Patterning Technology (MPT) enabling advanced lithography processes. This technology helps to reduce mask costs, improve constructability and provide a more reliable and accurate result. Additionally, the integrated optical equipment allows for high image quality with high numerical apertures, reducing phase shift and astigmatism effects. To ensure reliable operation and efficient wafer processing, FX 601F is equipped with a high-precision precision optic scanner and 3-D projection system. Its independent lens shift unit enables optimal scan parameters and fast-stepping operations regardless of wafer and pattern sizes. Additionally, the stepper is designed with lenses that have a high degree of pre-alignment accuracy, enabling stress-free and highly-accurate projection on large substrates. The device is further equipped with a built-in auto-focus machine for easy operation and excellent repeatability. Overall, NIKON FX-601F is a sophisticated wafer stepper with a number of advanced features that help ensure high-precision lithography with superior in-plane performance and maximum throughput. With its integrated MPT and highly-accurate components, NIKON FX 601F is a powerful choice for professional semiconductor fabrication and lithography processes.
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