Used NIKON FX-66S #9387891 for sale

NIKON FX-66S is a wafer stepper, or a stepper-type scanning photolithography tool, which uses advanced exposure optics and optics/machine control technology developed by NIKON to realise top-level total throughput. Specifically, FX-66S features a fully automated stage system which enables autonomous pattern alignment and overlay registration; improving throughput and achieving higher yields. It also uses a patented optical engine to produce high resolution images with up to 0.5µm resolution and a large depth of field. NIKON FX-66S system produces patterns over a wide range of levels, including 6-degree binary levels and 50 grey bit levels. Additionally, FX-66S uses a high-precision close-loop wafer stage that provides both the accuracy and stability required for high-end lithography, and produces minimum level shifts. It also offers advanced pattern optimization functions to reduce cycle time and the effects of optical distortions. For added pattern resolution and accuracy, NIKON FX-66S integrated PC-Controlled TTL option provides a high level of exposure uniformity, as well as uniformity assurance between the exposure area and the surrounding area. Furthermore, FX-66S includes a powerful SIPP Mirror Optimizer, which enhances critical feature accuracy along with its new highly optimized Advanced Step and Repeat feature. This enables layers with high-quality patterns and ultimately helps to reduce printing time and improve the production's quality.