Used NIKON i11D #293627556 for sale

NIKON i11D
Manufacturer
NIKON
Model
i11D
ID: 293627556
Wafer Size: 8"
Stepper, 8" Resolution: 0.3 µm NA: 0.63.
NIKON i11D is a digital chip stepper designed to process semiconductor-wafer fabrication with the highest accuracy, precision and throughput. NIKON I 11 D incorporates an advanced design that maximizes performance while minimizing wafer distortion and footprint. Its digital mask imaging technology reproduces complex, highly precise shapes and ensures superior wafer CD accuracy and precise focus and repeatability. I11D stepper is integrated with a high-performance undeflected scanning equipment with a large overlay stage and features a wide range of job-specific configuration options for each customer. This single-plate system gives users high level of integration that includes motorized stages, interior elevator, zooming optics, flat panel display and an intuitive touch-screen controller. This unit is compatible with a range of mask patterns and overlay stages, including reticles and high-dispersion scanners for high-precision measurements. I 11 D also features advanced safety features to reduce the risk of contamination, including a central shield-gas injection controller to protect the optical machine from outside contamination, real-time defect inspection functionality, even-shield coverage and integrated environmental monitoring. The wafer plow mechanism effectively seals the wafer against the underlying substrate, reducing the risk of corrosion. Also, to ensure high throughput and process yield, NIKON i11D offers a suite of process control functions, such as dose scanning, in-die localization, stage-to-stage matching and batch-to-batch matching. NIKON I 11 D is designed to meet the highest level of reliability, accuracy and speed for semiconductor-wafer fabrication. NIKON patented architecture enhances optical performance, accuracy and throughput, ensuring that wafer defects are minimized when running at high speeds. Able to process wafers as thin as 0.08 mm, the stepper can handle up to 150 mm diameter wafers with minimal distortion. For maximum productivity, I11D is equipped with advanced job-handling automation and error-recovery systems. It also offers a reasonable trade-off between accuracy and throughput and can be scaled to meet specific customer needs. The stepper's easy-to-use touch-screen controller ensures smooth operation and seamless communication with other equipment. By providing an accurate and reliable wafer stepper solution, I 11 D is the perfect choice for chip processing needs. Its high-performance capabilities, coupled with advanced safety features, help to achieve optimal wafer fabrication results, yielding fast and efficient batch production.
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