Used NIKON i11D #293797472 for sale
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NIKON i11D is a multi-layer, high-resolution wafer stepper manufactured by NIKON Corporation. It is designed for high-precision lithographic processing of microchips in the semiconductor industry, and it is one of the most advanced steppers available. It provides high alignment accuracy, superior exposure accuracy, and superior overlay characteristics, enabling precise production of the most intricate structures. NIKON I 11 D has a maximum resolution of 0.1 micrometers, which allows precise lithography reproduction and optimal fabrication of microchips. It supports patterning of device designs with fine line/space features down to 0.11 µm, and down to 0.25 µm for 3D structures. Its optical equipment enables a wide range of exposure wavelengths from ultraviolet (UV) to deep ultraviolet (DUV) spectrums. Its advanced alignment camera system with microscopic features detects features as small as 2 µm, and its auto lithography synchronization unit ensures the highest accuracy for each patterned layer. I11D has a large stage, measuring 350 mm x 350 mm, and can process large wafers up to 300 mm in diameter. It is also equipped with a specialized wafer handling machine for increased smoothness in the stages during patterning. This allows for multiple exposures to be implemented in a single process which saves on both wafer processing time and costs. Additionally, I 11 D has a specialized cleaning tool for substrate preparation, and a highly precise microscope for inspection and monitoring of the substrate pattern. This inspection and monitoring capability ensures optimization of each fabrication result. It also includes a unique auto-adjustment asset to change the focus level for different layer thicknesses and to ensure the highest quality patterning. Overall, NIKON i11D is a powerful next-generation wafer stepper that provides reliable performance for highly advanced microchip fabrication processes. Its high resolution, wide exposure wavelength range, powerful handling and cleaning systems, and precise inspection capabilities makes it an excellent choice for achieving superb lithography results.
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