Used NIKON i11D #293805260 for sale

NIKON i11D is an advanced wafer stepper, designed for stepping and resolving features of advanced semiconductor devices. By combining the advanced functions of optical, mechanical, and electronic components, NIKON I 11 D wafer stepper is capable of working with a wide range of wafer sizes and process applications. The mechanical design of i11D wafer stepper features a 1-axismotor drive with an X/Y table, allowing for precise positioning of the wafer surface for an optimal exposure. The 1-axis is driven by a microstepping motor, and a resistive motor encoder in conjunction with a controller allows for up to 6nm resolution of the X/Y table. The wafer stage is the standard for the industry, with a total travel range of 320mm X 100mm. I 11 D wafer stepper offers a wide range of process capabilities including sputter deposition, thermal oxidation, and pattern transfer. It is designed to use two 4-axis motion systems to ensure that the pattern is precisely transferred to the substrate. The first motion axis is mounted to the X/Y table and is driven by the microstepping motor, while the second axis is mounted to the chamber unit and drives the spindle. This combination provides a maximum working area of 4.0 mm by 40.0 mm. The optical equipment on NIKON i11D wafer stepper is designed for high resolution imaging The system utilizes an inclined beam illuminator, in conjunction with a CCD camera, for capturing the pattern. The CCD camera is designed for high resolution imaging and provides a resolution of 7.5 nm. The optical unit can also be integrated with various image enhancement systems, such as UV lasers, to further improve imaging capabilities. Additionally, NIKON I 11 D wafer stepper includes a vacuum stage that can hold up to 100 wafers at a time. I11D wafer stepper includes an intuitive user interface that can be easily navigated by machine operators, engineers, and technicians. The machine offers a real-time graphical user interface (GUI) that allows for rapid and accurate process setup and operation. Additionally, the tool offers the ability to store and reproduce process recipes. Overall, I 11 D wafer stepper is an advanced asset for the semiconductor fab that offers a wide range of process capabilities. Its advanced mechanical, optical and electronic components offer precise wafer handling and imaging, while its intuitive user interface ensures efficient operations. Its combination of features make it a highly desirable piece of equipment for the fabrication industry.