Used NIKON i12 #9285252 for sale
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ID: 9285252
Wafer Size: 8"
Vintage: 2000
Stepper, 8"
UDOF (Spec<0.05 um): 0.5
CD Range (Spec<0.05 um): 0.044
Coma (Spec<5%): 2.05%
Main body
Control rack
Air conditioner
Operation control box
2000 vintage.
NIKON i12 is a world-class wafer stepper that is developed and designed to meet the needs of today's dynamic semiconductor industry. This automation equipment utilizes precise alignment technology and is capable of creating large arrays of device features with equipment that is highly accurate and user-friendly for customers. The features of this system include high speed and precise alignment, automatic pattern recognition, improved overlay accuracy, small foot-print, and advanced process control. NIKON I 12 has precise design features which allow it to provide high speed, accuracy, and stability. It is designed with a two stage optical alignment unit that allows for highly accurate alignment of the wafer over the imaging plane. This offers extremely accurate placement of the device feature as well as improved tolerance for feature migration over multiple runs. The machine is also equipped with automatic pattern recognition and alignment correction functions which can detect minute variations in wafer patterns and adapt the placement accordingly, ensuring the highest possible yields. I12 also features a small foot-print, making it an ideal choice for users with limited space. It integrates large components into a compact and easy-to-carry body, reducing setup time and installation costs. Additionally, it has an advanced process control capability which allows users to monitor and adjust exposure, focus, and bracketing parameters to get the best imaging results. Furthermore, it allows users to store job data, which can be recalled quickly and accurately to increase productivity. Overall, I 12 is a powerful wafer stepper that offers users a great deal of control and accuracy in their semiconductor production needs. With its high-speed, precise alignment, and small footprint coupled with its advanced process control functions, this tool is an excellent choice for any production facility.
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