Used NIKON i12 #9285477 for sale
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Sold
ID: 9285477
Wafer Size: 8"
Vintage: 1999
Stepper, 8"
UDOF (Spec<0.05 um): 0.4
CD Range (Spec<0.05 um): 0.057
Coma (Spec<5%): 2.85%
Main body
Control rack
Air conditioner
Operation control box
1999 vintage.
NIKON i12 is an advanced wafer stepper designed for cutting-edge semiconductor photolithography operations. It uses patented Calibrated Automation components to achieve high throughput with minimal waste of materials, while maintaining extremely precise control over all process variables including position, exposure time, and focus. The wafer stepper can be used for a variety of device fabrication and process applications, all performed quickly and accurately. NIKON I 12 has a proprietary base frame that supports a very smooth and low-vibration motion. The three-axis linear motor-driven stage provides X, Y, and Z movements with a resolution of 0.01-micron, and can be independently adjusted with nanometer accuracy according to process requirements. In addition, the base frame features embedded vibration isolation technology, which helps ensure high levels of accuracy during the entire photolithography process. I12 utilizes a combination of advanced optics and powerful light sources to achieve high-resolution patterning with excellent contrast. An adjustable mirror positions the projection field over the entire wafer, while a novel image filter equipment minimizes the effects of optical distortion. The stepper is also equipped with a variety of devices to compensate for multiple exposure requirements, including a backside image mask, defocus control, focus shift alignment, and reduced backplane reflectivity. I 12's exposed system has several features to ensure optimum levels of productivity. It is equipped with a wafer-level wafer loader, which allows for quick and easy loading of up to 8 wafers simultaneously. The unit is also equipped with an advanced computerized numerical control machine (CNC) with motion control that monitors tool performance as well as zone and sub-zone adjustments to automatically compensate for any potential imperfections in the asset. Furthermore, a state-of-the-art vision model inspects each wafer for defects before and after patterning. Overall, NIKON i12 is an advanced wafer stepper that is designed to provide semiconductor photolithography operations with highly reliable patterning performance. The integrated Calibrated Automation technology guarantees excellent resolution, accuracy, and control, and the wide variety of features ensure automated, high-speed production of device components.
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