Used NIKON i12D #293748648 for sale

NIKON i12D is a high-performance wafer stepper used in semiconductor lithography. It is designed to optimize optical performance and provide uniform slope fidelity during lithography exposure. I12D combines a stationary and a motorized stage, along with a 12-way column type alignment equipment, to provide the highest degree of accuracy in wafer positioning. A unique two-level correction system compensates for the slight spatial displacement of laser positions to ensure precise alignment. NIKON i12D features a high numerical aperture of 0.93, a small spiral focus aberration of less than 5 nm, and a depth of focus of greater than 10 μm. This ensures a high level of accuracy for both pulsed and continuous wavene lithography options. I12D also comes equipped with a special imaging and focusing unit, in which the focus lens is tilted by a tilt adjustment mechanism to provide a warped image. This enables micrometer resolution imaging in multiple directions while compensating for any focus variation due to the angular offset of the irradiated regions of the wafer. NIKON i12D also has a compact all-in-one pulse irradiation machine, allowing for precise control of all irradiation parameters. This tool is ideal for both short-pulse source lithography and high-resolution low-power source lithography. The main body of i12D is constructed from a lightweight, yet robust ultra-high-strength aluminum alloy, for maximum heat dissipation and rigidity. The body also features a triple-level structural architecture, with each component isolated from vibration during operation. Overall, NIKON i12D is an ideal wafer stepper for applications such as semiconductor circuit patterning, stamp lithography, pattern transfer, and other processes requiring high resolution imaging and alignment accuracy. This asset offers excellent performance with minimal noise and vibration levels, ensuring precise image placement and quality.