Used NIKON i12D #293797473 for sale

NIKON i12D
Manufacturer
NIKON
Model
i12D
ID: 293797473
Stepper.
NIKON i12D is a wafer stepper in the i-line series. It is a highly accurate and precise imaging equipment that is ideal for production of semiconductors and other products requiring small, delicate features. I12D is a multi-level alignment 4-axis stage and an NA 0.33 for image optimization. The stepper uses a single scan, high precision, overlapping lens array to stitch the exposure fields together for the best quality production images. The lens array is designed to have low polarization errors and can magnify down to 0.7 μm. The wafer stage is a scanner and currently NIKON i12D provides the highest magnification resolution in the i-line series today. The stepper uses a unique algorithm to measure the position information at each exposure mesh point with sub-pixel accuracy, providing the user with a better measured value. This allows for tighter alignment of patterns to standard meshes for automatic defect analysis. The stepper also has a fast loading and positioning system which can load samples up to a 900mm diameter with a 50μm accuracy of motion. Another feature of i12D is its improved auto exposure unit that can integrate signal-to-shot noise (SSN) within 10 ms. This offers more stable throughput at high wafer sizes and can reduce off-center exposures. This feature further allows for improved defect-free image production for even the most challenging circuit designs. NIKON i12D can be used across a range of applications, including photomask production, LSI production, flat panel display (FPD) production, CMP (chemical mechanical polishing) production and MEMS production. The wafer stepper has also been proven to be extremely reliable and cost-effective in production environments. I12D is an excellent, precision imaging machine that provides the user with tight tolerances, high imaging quality and faster throughput. It is a great option for users who need a wafer stepper that can reliably produce high-quality microcircuits and products.
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