Used NIKON i12D #9068880 for sale

NIKON i12D is a high-end wafer stepper, designed to precisely measure and image critical device features on substrates such as semiconductor wafers. I12D features an advanced hybrid-gun optical equipment that uses both a high resolution i-line projection lens and a low energy, short-wavelength projection lens. This hybrid-gun system allows NIKON i12D to image deep sub-micron features on wafers accurately and rapidly. I12D also features a high accuracy, dual stage positioning unit that employs both air bearing and motor driven X/Y stages. This positioning machine is automated and capable of achieving precisely spaced movements with an accuracy of 10nm for X/Y and 1 micron for Z. NIKON i12D also has a powerful illumination tool consisting of an LED strobe with dual exposures that can accommodate almost any application from low spatial frequency images to high nanometer resolution. I12D has a wide range of operation modes including brightfield mode, darkfield mode, sideview mode, telecentric mode and annular brightfield mode. The combination of these modes makes it possible to image critical device features accurately and rapidly. NIKON i12D also has a powerful data storage asset called the Digital Imaging Model (DIS) with a large capacity hard drive capable of storing up to 256 Gigabytes of data. This makes it possible to store images from multiple exposure runs and to conveniently view them on the large LCD screen. In addition to its imaging capabilities, i12D has many built in alignment and control systems that enable precise and accurate wafer alignment and imaging. For example, NIKON i12D has a comprehensive wafer misalignment detection (WMD) equipment that is highly accurate and reliable. I12D is capable of handling almost any system and substrate, and is designed to meet the highest performance standards in the industry. It is an ideal solution for high resolution imaging requirements such as those in the advanced semiconductor device manufacturing process.