Used NIKON i14 #9036216 for sale
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NIKON i14 is a high performance wafer stepper used to fabricate precisely formed parts on a wafer for microfabrication. It is relied upon for high-efficiency batch production with a high degree of repeatability and uniformity. It has the capability to handle large substrates up to 14-inches and enables lithography on substrates up to 24-inch. NIKON I 14 employs multi-exposure capability, allowing it to produce parts with multiple levels of precision. It has the ability to control the exposure dose to 0.01μm² with a high degree of accuracy in order to produce nanoscale geometries. In addition, i14 has an auto-reverse mode which can be triggered in order to reverse the exposure field during lithography. This is an invaluable feature when dealing with a complex multi-level lithography pattern. I 14 has high-resolution imaging capabilities with an integration of near-field optics combined with its spin-shift functionality for higher resolution. It can produce fast simultaneous alignment for spin-shift lithography. Additionally, the spin-shift capability enables the production of complex features in opto-electronic components for optical and LCD manufacturing. The equipment has a high-speed 6-axis robot which is able to move accurately and precisely in confined spaces. It includes a lifting stage that allows the positioning of the wafer in a secure and stable manner. The system also comes with a vision unit with the capability to align with an accuracy of 0.1μm. The machine is equipped with efficient air-cooling capabilities to ensure stable operation of the stepper as well as reduce the risk of contamination. It has an advanced control tool which is capable of controlling the accuracy and run time of the stepper. With such robust features, NIKON i14 is a reliable asset for various fabrication processes.
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