Used NIKON i7 #9185650 for sale

NIKON i7 is a state-of-the-art optical wafer stepper. It is capable of lithography over a wide exposure range including back-end-of-line (BEOL) process applications. NIKON I 7 is equipped with a new NIKON MAPS III (Multi-Projection Alignment Equipment III) reticle aligner that provides high-accuracy registration, in addition to NIKON innovative B-facility oriented, standard-output G-MAP binary data format. I7 features a 4-plate high-sensitivity slit field image sensor, enabling simultaneous 1 pixel alignment. In addition, I 7 employs a new active-AOM (Auxiliary Objective Module) with a 4-element lens system to reduce coma aberration. This module significantly increases the field uniformity and sharpness. Furthermore, NIKON high-performance stage unit improves machine throughput by decreasing stage movement time. All this is accomplished without sacfrirfig percision. NIKON i7's advanced Diamond-Torque stage is capable of sub-nanometer positioning accuracy and accelerations up to 100μm/sec2. The high-precision stage allows for stable and consistent imaging performance throughout the exposure window. NIKON I 7 also features a new high-accuracy electron multiplying CCD (EM-CCD) for sub-nanometer display accuracy and 1 nm pitch pattern recognition. This EM-CCD is highly reliable for applications such as micro through-hole and through-contact alignment and can be used even for applications with narrow patterns. In addition, NIKON SPTS (Shutter Process Tool Software), an intelligent pattern matching feature, accurately compares CAD data with measured cross-section data for robust process monitoring. This allows for full control of process uniformity, traceability and enables process optimization in real-time. NIKON designers paid special attention to the ergonomics of i7. I 7 was designed to be user-friendly with easy operation, tool access and maintenance. Finally, the tool is covered in a durable stainless-steel construction with high-density shielding for vibration and noise dampening. NIKON i7 is an advanced, precise, and reliable tool for research and development as well as in production process applications.