Used NIKON NSR 1505 G4C #9296337 for sale

NIKON NSR 1505 G4C is an advanced wafer stepper used in the fabrication of semiconductor and other microdevices. The equipment consists of a scanner, column, and retractable optic system, enabling high accuracy and speed during the lithographic process. It is able to move large fields of view, supporting substrates up to 150 mm in diameter, with a maximum field size of 330 mm. The G4C unit is designed with an advanced infinity machine, allowing magnification to be adjusted between 1.5X to 25X along with a high-speed 525 mm per second scan speed. It is equipped with some of the finest features, including a direct alignment tool, die-to-die stitching, and variable shaped beam scanning, enabling ultra-fine resolutions. NIKON NSR 1505 G 4 C asset is capable of handling multiple exposure applications in a single scan, allowing for higher throughput and higher levels of accuracy. This is enabled through the variable shaped beam scanning (VSB) model, which provides precise control to achieve dimensional plays on printed patterns or to increase line edge roughness (LER). As one of the fastest systems on the market, the G4C stepper offers a high resolution at 28nm and line widths as small as 10nm. It is also equipped with a full synchronization shutter (FSS) equipment that reduces exposure times, preventing stigmation on micro patterns and providing a high-precision overlay alignment. Furthermore, NSR 1505 G4C system is designed to be easy to use with an ergonomically friendly control panel. An integrated overlay control unit is also included, allowing users to make adjustments and calibrations with ease. Visual tracking machine (VTS) and various smart software solutions are included, to improve production capability and visibility into production, allowing for real-time monitoring and preventive maintenance. In conclusion, NSR 1505 G 4 C is a versatile and reliable wafer stepper, designed to provide outstanding performance and results in the fabrication of microdevices.