Used NIKON NSR 1505 G6E #9207086 for sale

NIKON NSR 1505 G6E
Manufacturer
NIKON
Model
NSR 1505 G6E
ID: 9207086
Wafer Size: 4"
Vintage: 1988
Steppers, 4" 1988 vintage.
NIKON NSR 1505 G6E Wafer Stepper is a highly advanced stepper for semiconductor lithography. This equipment is designed for 200mm wafers and incorporates the unique diffraction-limited Optics and the patented Immersion technology. The Optics features Multi Beam Scanning technology, meaning that multiple laser beams are used simultaneously to achieve superior image resolution and accuracy. Immersion technology applies liquid immersion medium between the lens and the wafer to increase accuracy and reduce optical aberrations. This stepper also features a dual beam mask aligner, which combines two beams to accurately expose masks on the wafer, and delivers best-in-class edge placement accuracy and dose uniformity. The advanced stage design of NIKON NSR-1505G6E Wafer Stepper allows for the use of larger substrate sizes with superior accuracy. Its large, advanced wafer stage offers an XY working area of 600 x 600mm and a smooth, controlled motion for optimal stability and accuracy. It also has a large work envelope with a high-performance Wafer Protection Device, preventing any unwanted cases of mask or wafer breakage due to inappropriate handling. NSR 1505 G6E Wafer Stepper boasts powerful wafer scanning capabilities, achieving throughput speeds of up to 1200 wafers/hour. It can also take care of multiple operations in one cycle, such as writing exposure data on the fly while exposing the wafer mask. This system also incorporates a quality control unit, which monitors the wafer alignment and registration, and automatically manages exposure spots from wafer-to-wafer during automated production runs. In terms of safety features, NSR-1505G6E Wafer Stepper is equipped with a safety shutter, to protect the stepper from damage in the event of abnormal operation. It also features human interface circuit breaker, which cuts power in the event of an electrical overload. This is complemented by an automated protective machine which guards the optical equipment against the risk of excessive radiation exposure. Overall, NIKON NSR 1505 G6E Wafer Stepper is a reliable, high-performance lithographic tool, incorporating a range of advanced features and safety protections, making it an ideal choice for semiconductor processing.
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