Used NIKON NSR 1505 G6E #9209620 for sale
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ID: 9209620
Wafer Size: 4"
Vintage: 1988
Stepper, 4"
Main computer:
System: PDP
Hard disk
Disk drive: Floppy
Illumination type:
Shrinc type: Conversion
Revolver type: Conversion
Wafer stage:
Chuck type: 4" Pin
Screw type: Ball
Reticle alignment: ISS
Reticle microscope: 15 mm
Wafer alignment: WGA, LSA
Auto focus: Single
Wafer loader:
Wafer size: 4"
Loader type: Type1
OF Type: Flat
Flat zone: 6C
In-line: No
Cassette: Left, Right
Control rack position: Right
PPD1: No
Barcode system: No
Chamber type: ASAHI S71
1988 vintage.
NIKON NSR 1505 G6E is a highly advanced wafer stepper made by the Japanese manufacturer NIKON. The stepper is designed to accurately process wafers for the mass production of various semiconductor components and other devices. NIKON NSR-1505G6E utilizes NIKON Sub-Half Micron Resolution Technology (SHMR). This technology allows for the processing of features as small as 0.3 µm in critical dimensions. NSR 1505 G6E achieves very accurate overlay and roundness repeatability, and features an auto-focus equipment and a 2-stage laser exposure system that minimize overlay misalignments in different steps. This ensures that even the smallest, most delicate features are accurately printed and aligned. The wafer stepper also includes an image correction unit that automatically adjusts to any shifts in the image due to environmental factors. NSR-1505G6E is capable of processing over 100 units per hour and can handle up to a 6-inch wafer. In addition, the stepper is equipped with a high-precision stage, a 4-axis high-precision motor, and an internal PLC machine that enables reliable and accurate operation in diverse production environments. NIKON NSR 1505 G6E is capable of processing a variety of patterns, including line, diagonals, and die markings. It can also handle complex optical characteristics such as transparent dielectric film, nano images, and air hole trench patterns. The stepper has numerous safety features, including a recovery tool that allows for automatic recovery from any abnormal situation, and a dust collection asset to ensure a clean and safe production process. NIKON NSR-1505G6E is a robust and reliable stepper designed to provide accurate and precise work when processing wafers. Its SHMR technology provides high accuracy and flexibility for cutting-edge semiconductor production, ensuring a reliable and efficient production process.
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