Used NIKON NSR 1505 G6E #9227620 for sale

NIKON NSR 1505 G6E is a critical dimension (CD) and overlay metrology device for semiconductor devices, designed to provide high-accuracy results for single- and multi-pattern wafer stepper operations. It is capable of operating with a wide variety of imaging substrates, including quartz, fused silica, CaF2, and others, and is designed for use in various back- and front-end device construction applications in microelectronics. NIKON NSR-1505G6E Wafer Stepper is equipped with a 5KW carbon dioxide (CO2) laser and an integrated vertical scan axis. It is capable of producing resolutions of up to 0.2 µm, and provides stepper operation speeds of up to 24-150mm/s. Its primary stepper operation parameters include focus offset, phase shifting, Scan Repetition, Scan Size, and Scan Direction. NSR 1505 G6E incorporates a multi-detector optimization and configuration system, featuring a number of specialized detectors and optics, with various tools and image processing systems. Its focal point monitor can detect the changes in focus position for each exposure, allowing the device to achieve a high level of accuracy and precision. It is further equipped with a number of software and hardware enhancements, such as its anti-structure distortion and focus control features. NSR-1505G6E utilizes a range of imaging modes, such as Top-Down (L&L), de-fringe, multi-shot, and stitching, to achieve optimal imaging results for various applications. It is capable of processing up to 12 blocks simultaneously, and is able to expose multiple patterns in a single wafer in a single exposure. It is further equipped with an integrated wafer handling system and automated loading and unloading functions to facilitate faster processing cycles. NIKON NSR 1505 G6E is suitable for applications in substrate flatness inspection, CD measurement, resist profile monitoring, image enhancement, and threading. It is part of the company's line of Wafer Stepper systems, and works with the NSR-1505 pattern generator for electrical Wafer Level Compliance testing. It is backed by NIKON comprehensive support and service network, providing its customers with a reliable system that meets the highest standards of accuracy and performance.