Used NIKON NSR 1505 G6E #9233490 for sale
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NIKON NSR 1505 G6E is a high performance wafer stepper equipment used for semiconductor mass production. It is capable of imaging wafers up to 8 inches in size with a 4X reduction ratio, at a maximum image field size of 532mm x 603mm. This stepper is equipped with a deep UV Mercury lamp, which allows for uniform lighting on wafer surfaces using a HeNe laser-based alignment system. It also features an advanced optical unit with a 0.5 μm or 0.25 μm resolution. The machine also has an ElectroStatic Chuck (ESC) for clamping the wafers securely in place during the imaging process and a Step and Scan Longer Exposure (SSLE) function, which allows for uniform light exposure across the entire surface of the wafer. NIKON NSR-1505G6E is also designed to be extremely efficient and productive for imaging large numbers of wafers. The tool features an automated wafer handling asset that uses a wafer carrier, robotic arm, and conveyor belt to quickly move wafers between the measuring station, loading/unloading station, and imaging station. In addition, the stepper also includes a recipe management model, which allows users to quickly adjust process settings for each individual wafer, ensuring that the best results for each imaging process is achieved. The equipment also has a built-in auto-calibration function that allows for highly accurate imaging with minimal setup time. NSR 1505 G6E was specifically designed to meet the demanding requirements for semiconductor manufacturing processes, such as lithography. It is also designed to be highly reliable, with a mean time between failures (MTBF) rating of over 500,000 hours. NSR-1505G6E is compliant with SEMI E-53 and GEM (global equipment monitoring) standards, which means that all the necessary data is readily accessible from the system, with minimal effort. Finally, this stepper unit is also compliant with EU RoHS regulations, meaning that it is certified to have minimal impact on the environment.
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