Used NIKON NSR 1505 G6E #9245623 for sale
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ID: 9245623
Stepper
Power supply: 220 VAC, Single phase, 50 A, 50-60 Hz, 4 W, 18 kW.
NIKON NSR 1505 G6E is a state-of-the-art wafer stepper designed for precision processing of substrates in semiconductor and related industries. The equipment's advanced technology enables high throughput and uniformity, achieved through its rigid workspace based on the NSR's NIKON Heavy Nano Control II platform. Substrates are exposed at ultra-high resolution and defect-free reproducibility through the machine's high-precision 6-axis motion control system and ultra-high precision direct-drive motor unit. The machine's high-resolution, high-accuracy, and high-dynamic positioning machine enables processing of substrates down to 5nm. The tool features a thermally stable stage design with temperature compensation ranging from 0-60°C for its 3-axes, optimized for ultra-high precision patterning tasks. The integrated vertical / lateral positioner also enables precision exposure of staggered polygon angles and x-y modulation, ensuring higher-accuracy and superior repeatability of overlapped patterns. In addition, NIKON NSR-1505G6E features an industry-leading alignment accuracy with its auto-field alignment and jump correction loops, which allow for precise registration and elimination of distortion errors. The machine's advanced alignment accuracy also helps to give a boost to defect detection and particle recognition. NSR 1505 G6E includes a wide range of process functionalities, including advanced carrier and stage alignment functions, precise and repeatable patterning of variable shapes, light flares and darkening, and mirror and array functions. Other features include fully-automated connectivity and operations, environmental control such as dust and ESD protection, and a built-in cleaning asset. NSR-1505G6E wafer stepper is a versatile and highly-flexible model offering superior performance and precision. With its high-accuracy and reliable processing capabilities, it is an essential tool for manufacturers of any size, offering high throughput and quality production.
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