Used NIKON NSR 1505 G6E #9261837 for sale

NIKON NSR 1505 G6E
Manufacturer
NIKON
Model
NSR 1505 G6E
ID: 9261837
Wafer Size: 5"-6"
Stepper, 5"-6".
NIKON NSR 1505 G6E is a fully-automated wafer stepper designed for high-volume wafer photomask production. It offers advanced scanning accuracy and throughput along with reduced part-changeover times. With its 6-stage, single wafer loading equipment, NIKON NSR-1505G6E enables efficient production of high-precision fine pattern wafers. NSR 1505 G6E is designed to process 2, 6, 8, 12 and 15 inch wafers with a maximum k1 linearity of 0.5 percent or higher. It has a maximum exposure wavelength of 193 nm and a focus adjustment of less than 2.5 μm. Its external optical system provides improved throughput and precision patterning. It also offers a Sub-Beam Writing Unit (SBS) for fine-patterning of high-performance reticles in the 5 nanometer or above range. NSR-1505G6E has a number of features to ensure reliable operation and process optimization. Its on-board alphanumeric display provides users with access to machine settings and provides a visual indication of machine diagnostics and performance parameters. Its advanced digital control software ensures optimum throughput, even with the most difficult processes. It also has a self-contained auto-calibration tool that only needs to be set once and can be recalled instantly. NIKON NSR 1505 G6E's highly accurate and stable stages deliver consistently high-quality part production with high-precision, resulting in better yields and increased productivity. Its automatic wafer aligner compensates for wafer chucks displacement errors and minimizes the need for manual re-alignment. NIKON NSR-1505G6E is equipped with a variety of extra features to provide maximum stability during the operation and make part-changeover easy. It features an automated chuck asset that accommodates various parts - reducing unproductive time due to manual part-transfer. It also features dual-stage exposure to reduce alignment-chaotic operations - and multiple stage exposures to facilitate large number of parts. NSR 1505 G6E is a highly efficient and reliable wafer stepper that is designed to deliver high-precision results. Its advanced features ensure precise scanning accuracy and reduction of production time. With its robust design and easy-to-use interface, NSR-1505G6E provides the ideal solution for high-volume wafer photomask production.
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