Used NIKON NSR 1505 G7A #9160455 for sale

NIKON NSR 1505 G7A
Manufacturer
NIKON
Model
NSR 1505 G7A
ID: 9160455
Wafer Size: 4"
Steppers, 4" Reticle size: 5".
NIKON NSR 1505 G7A Wafer Stepper is an advanced imaging tool used for production of photomask substrates for semiconductor and other electronic components. This tool provides a high-precision optical imaging equipment using Deep Ultraviolet (DUV) wavelength light to accurately and consistently define patterns for inscription on a substrate. NSR 1505 G7A has a maximum image field of 150mm x 150mm, and features a Vycor-enhanced optical system that utilizes an axially symmetric numerical aperture (NA) of 0.68. This high-performance unit allows for precise alignment of up to six projection lenses for a maximized field of view. In addition, NIKON NSR 1505 G7A can generate a maximum resolution of up to 2.4 μm (0.096 mils) with Deep Ultraviolet wavelengths of 248nm. The main features of NSR 1505 G7A are its DoF engineering, stepped glass zoom lenses, and QV semi-conductor materials. The DoF engineering provides homogeneous depth-of-field with Gaussian intensity distribution from 0.2 um to 40 um, while stepped glass zoom lenses allow for reduced distortion and accurate viewing of features at multiple magnifications. The QV semi-conductor materials have reliable etch and deposition performance with good adhesion and long-term stability. The tool features a Three Plate Image Field Stabilization (TP-IFS) platform that ensures minimal drift of the image field during exposure. This helps to ensure that the patterns produced are identical with each exposure. NIKON NSR 1505 G7A also has an integrated wafer-level alignment machine that allows for precise alignment of pre-processed substrates, and a vacuum slide film stage that provides repeatable wafer centering and improved productivity. The tool includes an automatic laser-marker to ensure accurate registration of masks onto the exposed wafer. Additionally, the tool features a high-performance exposure control asset that can execute up to eight job settings and expose multiple chips in a single shot. Finally, NSR 1505 G7A Wafer Stepper is integrated with an intelligent flex-disk handler that captures up to 50 disks and performs inspections autonomously. This ensures optimal quality and performance for mass production.
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