Used NIKON NSR 1505 G7D #9045469 for sale

Manufacturer
NIKON
Model
NSR 1505 G7D
ID: 9045469
Wafer Size: 6"
Vintage: 1990
Stepper, 6", parts machine Nikon NSR control rack Stored in cleanroom 1990 vintage.
NIKON NSR 1505 G7D Wafer Stepper is a precision lithography equipment designed for a variety of application needs. It is capable of performing mass-production lithography processes that can meet stringent yield requirements in advanced semiconductor packaging and manufacturing. NSR 1505 G7D is a high-accuracy and high-throughput lithography system that offers superior throughput, throughput stability, and the highest resolution available in its class. It is also designed to ensure uniform and stable exposure doses, allowing customers to produce the highest-quality semiconductor devices. The unit also incorporates a number of advanced features, such as automatic substrate alignment in three dimensions, unequal exposure control for horizontal and vertical exposure operation, automatic substrate indentation and dust inspection, and a variety of substrate handling options. NIKON NSR 1505 G7D uses a 5-micron slit, with a laser diode that produces radiation over a maximum output of 200 mW/cm2. It offers a wide wavelength range from 365 to 445nm, and it has a maximum exposure time of 5μms. It can achieve a minimum focus of 18μm, as well as submicron focus over a wide temperature range. NSR 1505 G7D uses a direct projection stepper that supports up to 200 mm diameter wafers. It is also capable of handling a variety of substrates, including silicon-on-insulator and thin film foils. Furthermore, it can be used with photoresist and other materials, making it an ideal choice for advanced kind of semiconductor lithography. When using NIKON NSR 1505 G7D Wafer Stepper, it is possible to program scan and focus parameters to process a large number of substrates with high uniformity and yield. Moreover, it also allows for easy alignment and substrate centering thanks to its built-in pattern recognition machine and autofocus function. Finally, NSR 1505 G7D is highly compatible with masks, plates, and other accessory parts. This ensures easy integration to existing lithography equipment and enables the rapid transfer of technology between different applications.
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