Used NIKON NSR 1505 G7E #293589147 for sale

NIKON NSR 1505 G7E is a wafer stepper designed for high-throughput and high-fidelity lithography. It is designed for the production of both micro-sized and nano-sized microchips. The machine's light source is a laser-diode array that provides a high level of exposure intensity. The exposure area is 121mm x 121mm, with a depth of focus of 0.75μm. The machine's engine is of a unique servo-controlled motion equipment, providing smooth and precise motion. The optics system is also powered by this servo-controlled motion unit and is composed of a two-lens machine, with a numerical aperture (NA) of 0.6 and a working distance of 3.6 mm. This tool is able to continuously monitor and optimize its performance, allowing for the highest degree of accuracy. NIKON NSR-1505G7E also features a stage asset with a large travel range of 120mm in X- and Y-axis, and a maximum travel speed of 200 mm/sec. This stage model is designed for thermo-mechanical stability and to limit air turbulence. The machine offers a manual auto focus (MAF) equipment for fast and accurate focus setting. This system features a long lifetime and is able to detect the surface flatness, allowing for a smoother movement across the wafer. The machine also includes a large capacity loader/unloader unit that allows a user to load and unload the wafer in one single operation, resulting in a faster throughput. NSR-1505 G7E also includes a large capacity wafer cassette. This is linked with a wafer ID management machine to allow for wafer key-in and fast wafer slots loading. Overall, NSR 1505 G7E is an ideal machine for high-throughput and high-fidelity lithography, offering a fast loading/unloading process, high-end optics and motion systems, and a long lifetime. It is the perfect choice for volume production of nano and micro chips.