Used NIKON NSR 1505 G7E #293717121 for sale
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NIKON NSR 1505 G7E is a 5-axis wafer stepper designed for high-volume wafer processing installations. NIKON NSR-1505G7E is designed to provide robust and high-precision lithography, which yields reliable results even in the most challenging production environments. The product is designed with a 150mm×150mm frame size and 40mm travel in XYZ and 5-axis motion. The stepper is equipped with NIKON original 5-axis Technology, which allows for 3-D imaging with improved accuracy and throughput. NSR-1505 G7E also features a fast-exposure laser, which offers an extended operating temperature range from -25˚C to +50˚C. The stepper has a high-frequency illumination equipment that has been designed using high-precision components for producing uniform illumination across the entire wafer surface. This system provides an adjustable energy distribution between the five axes. NIKON NSR-1505 G7E also features an automatic wafer position control unit to ensure consistent and repeatable substrate alignment. The stepper is equipped with an 8-inch contact image sensor (CIS), which can detect and measure the height deviation of individual images on the wafer. This ensures the highest accuracy to meet the requirements of 0.2 micron line widths and contact patterns. An optional high-precision magnification training machine is available to further improve accuracy and reduce line width variations. NSR 1505 G7E provides a silent operation, a vibration-free motion tool, automatic alignment to the wafer edge, and excellent dose control. The stepper is designed to support a wide range of wafer sizes and types, and a wide variety of radiation sources, including ArF laser light, UV LEDs, and UV lasers. In addition, the stepper features a user-friendly and advanced control software that offers stability and accuracy operations for enhanced productivity and improved cost-effectiveness. The operation data is easily accessible and the automatic operation can be reproduced with the same results from run to run. Overall, NSR-1505G7E is a perfect lithography solution for high-volume semiconductor fabs. The advanced features make it one of the most reliable and productive wafer steppers in the industry.
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