Used NIKON NSR 1505 i6A #293817954 for sale

NIKON NSR 1505 i6A
Manufacturer
NIKON
Model
NSR 1505 i6A
ID: 293817954
Stepper Numerical Aperture (NA): 0.45 Resolution: 750 nm DCO:  140 Throughput (WPH): 52.
NIKON NSR 1505 i6A is a high-performance, high-precision wafer stepper designed for lithographic processes. It is equipped with many cutting-edge features such as digital servo motors, a closed-loop optical lens equipment and a robust holder-sensing capability. NSR 1505 i6A is capable of producing images with a 1.3 μm resolution, minimally missing worths of 1.0 μm, fully automated alignment and while able to accurately repeat a predetermined exposure dose. The optical system of NIKON NSR 1505 i6A includes a patented large-aperture, high-numerical-aperture (NA) lens unit that is fitted with Digital Servo motors. The Digital Servo motors enable the machine to perform high-precision ultra-sensitive operations and achieve maximum speed, accuracy and resolution. The holder-sensing capability of NSR 1505 i6A is also very useful when a precise repeat of an exposure dose is desired as the tool is able to detect precise changes in the wafer holder surface level. NIKON NSR 1505 i6A is capable of producing high-resolution images up to 1.3 μm depending on the features that need to be imaged. It also features a fully automated alignment asset which simplifies the alignment process and makes it easier to handle. The model also offers a uniform exposure dose, which guarantees high photolithographic process stability. It can accommodate a wide range of wafers sized from 50 to 200mm as well as many different photomask sizes. In short, NSR 1505 i6A is a precision wafer stepper designed for high-precision lithographic processes. It features a high-NA lens equipment fitted with Digital Servo motors, a holder-sensing capability and a fully automated alignment system for precise dose repeatability. NIKON NSR 1505 i6A can accommodate a wide range of wafers and enables it to produce high-resolution images up to 1.3 μm in size that are uniform in exposure dose. The many features of NSR 1505 i6A make it the tool of choice for the highest-precision lithographic processes.
There are no reviews yet