Used NIKON NSR 1505 i6A #9281881 for sale

NIKON NSR 1505 i6A
Manufacturer
NIKON
Model
NSR 1505 i6A
ID: 9281881
Lithography.
NIKON NSR 1505 i6A is a wafer stepper designed for advanced lithography applications. It is an ultra-compact ray-tracing lithography system capable of producing high-resolution patterns with a maximum field size of 150 mm. NSR 1505 i6A is capable of sub-200nm resolutions with its integrated KrF (Krypton Fluoride) excimer laser light source. Its compatibility with KrF and ArF (Argon Fluoride) laser enables low-cost device production, while its innovative i-line focused multiple illumination provides enhanced feature accuracy and resolution. NIKON NSR 1505 i6A offers simple and precise alignment and exposure through a combination of 1024ch digital encoders, high-accuracy alignment, and an advanced reticle-less programmable stage. It is equipped with an image pair recognition system which allows it to precisely align the materials, eliminating the need for vision systems. Additionally, its 400mm/s maximum stage scanning speed significantly reduces exposure times. In addition, NSR 1505 i6A is equipped with two fully-customizable software packages. The Automated Stepper Controller (ASTC) allows for real-time exposure control, while the Automated Lithography Coordinator (ALC) enables multi-die patterning and optimization of process parameters. Its user-friendly graphical user interface makes operation fast and simple, while the built-in worry-free wire-delay compensation ensures the highest possible hardware precision. Moreover, NIKON NSR 1505 i6A is capable of upgrades to its features through externally-mounted connectors, allowing users to customize their systems with additional components. This helps drive efficient productivity without having to break the bank. Its high-level operability, gentle handling of wafers, and optimized wafer alignment guarantees years of reliable and efficient operation. As such, NSR 1505 i6A is an excellent choice for advanced, cost-effective lithography.
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