Used NIKON NSR 1505 i7A #293634869 for sale
URL successfully copied!
Tap to zoom
ID: 293634869
Wafer Size: 4"
i-Line stepper, 4"
Non-funtional parts:
Circuit boards: A-5, A-9, A-13, A-17, A-19, A-23, A-34, A-35
(3) Motor modules RT
Z/Theta stage motor module
Stage screw
X-Y Axis motor
Mercury lamp base
Power supply of each module
Wafer and reticle handler of module motor
FIA.
NIKON NSR 1505 i7A is a leading-edge deep-UV wafer stepper equipment designed to meet the most demanding lithographic requirements. It offers superior overlay accuracy, a wide range of exposure tools, and the ability to process wafers up to a size of 7 inches in diameter. NIKON NSR-1505I7A utilizes a powerful, digitally-controlled 5 mW I-line ArF laser, capable of working with a full range of exposure doses. The system is equipped with an integrated Near-Field Correctors (NFCs) photography reduction unit, which offers superior performance and accuracy, by providing an advanced scan field flattening function for non-orthogonal distortions. This is aided by an innovative plane wave illumination machine, which offers superior uniformity, reduced aberrations, and high resolution. In addition, NSR 1505 I7A is equipped with a high capacity alignment tool that offers superior alignment accuracy for all exposure conditions and applications. The alignment asset includes a high-resolution Sub-Micron Platform, and a patent-pending Automatically Selectable Reticle Alignment (ASRA) Model. The ASRA Equipment also offers advanced overlay measurements to ensure that every sample is accurately aligned. The exposure system of NSR 1505 I 7 A can also be configured to process wafers of varying size, thickness and exposure requirements. This is done using a patent-pending Variable Tuning Option, which can be quickly set up, and tailored to meet the specific needs of each application. Furthermore, NIKON NSR 1505 I7A is also equipped with a wide range of compliances and exposure tests. This includes the ability to perform high-accuracy Overlay measurements, Exposure Verification tests, and a wide selection of wafer Exposure Uniformity tests. In conclusion, NSR-1505I7A is a superior wafer stepper unit, with a wide range of exposure tools, and the ability to process wafers up to a size of 7 inches. With the advanced exposure machine, the NFC photography reduction tool, the patent-pending Variable Tuning Option, and the Overlay measurements, Exposure Verification tests, and a wide selection of wafer Exposure Uniformity tests, NSR 1505 i7A is an ideal imaging asset for many demanding lithography applications.
There are no reviews yet