Used NIKON NSR 1505 i7A #9226270 for sale

NIKON NSR 1505 i7A is an advanced wafer stepper that allows for a highly precise, cost-effective solution for patterning photomasks in the fabrication of a variety of microdevices. This machine was designed to enable production and inspection of devices as small as 190 nm line/space. It offers an integrated equipment that is compatible with OpenValuePhotomask (OVP) software, providing an easy to use automated platform with efficient set up procedures. NIKON NSR-1505I7A is a 5-axis, parallel-beam, illuminated mask scanning system, which utilizes a high-resolution projection lens to focus an image onto a mask or wafer. It offers a field size of 40 mm in x- and y-axis direction and can be utilized for sub-100 nm patterning. The bonding option allows for reduced mask production costs, enabling the machine to become an ideal choice for higher volume production. NSR 1505 I7A allows for double-sided exposures, with independent exposure heads for either side. An adjustable heat control unit ensures an exact process temperature for better process control. The built-in alignment machine enables precise overlay analysis, allowing for precise placement of different patterns on the wafer. The machine also offers features such as automatic mask transport and wafer transfer, along with an automated wafer chuck positioning mechanism for accurate and faster wafer centering. In addition, NIKON NSR 1505 I7A has a high-resolution measurement capability capable of identifying pieces of mask features that are as small as 70 nm. The i7A is equipped with a three-dimensional auto focus tool to allow for accurate alignment of the mask and wafer and improved wafer-to-wafer uniformity. Ultimately, NSR-1505I7A is a powerful, accurate, and scalable wafer stepper designed to provide a cost-efficient production process with superior results. Utilizing advanced automation capabilities and a highly capable optical asset, this machine is an excellent solution for advanced mask fabrication and inspection.