Used NIKON NSR 1755 i7 #9053209 for sale
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ID: 9053209
Stepper
Reduction Lens Type : 5iC1S-91359
PPD : YES
Reticle Size : 5"
Reticle Case : 8 each
Reticle Barcode Reader : YES
Movable Reticle Microscope : YES
Stage Screw : Ball Screw
Wafer Chuck : 6" ceramic
Pre Alignment 2 : YES 6" SEMI
Chip Leveling : YES
Exposure Field Size : 17.5mm x 17.5mm
RL Library Type : ARL
Extended RL Library : No
Wafer Size : 6 inch
Wafer OF Type : YES OF SEMI
Extended WL Carrier : (2) units
Inline Type : NO
Control Rack Position : Special LEFT
Alignment Sensor : LSA/FIA
Signal Tower : YES.
NIKON NSR 1755 i7 is a high precision wafer stepper designed for device fabrication in semiconductor, MEMS, LED, and advanced packaging applications. This next generation platform was designed in collaboration with leading lithography experts at TSMC to deliver increased throughput for the most demanding production requirements. NSR 1755 i7 wafer stepper offers superior throughput, with maximum throughput of up to 90 wafers per hour with a focusing accuracy of up to 0.07 microns for wafer alignment. It is equipped with an advanced stage control equipment that utilizes multiple arrays of encoders for high speed and precise adjustment of the stage. The wafer stage is also equipped with an autofocus system, which can adjust the focus of the wafer images with great precision. The wafer stepper also benefits from a high-resolution wafer chuck design that allows for accurate and reproducible performance when handling various types of wafers. This NIKON NSR 1755 i7 platform is also designed with advanced projection optics utilizing an aspheric lens design to increase optical throughput and decrease aberrations that can occur during exposure. The optical unit uses a 5x5 mm reticle mobile machine that allows a large array of masks to be used with the stepper. It also features a polarization control tool that provides diffraction reduction to improve image quality. NSR 1755 i7 is equipped with a user-friendly graphical interface and an automated job editor that allows users to easily set up job sequences and change parameters quickly and conveniently. This stepper includes a robot asset that automatically loads and unloads the wafer from the wafer cassette, as well as a wafer chucking model for precision wafer handling. NIKON NSR 1755 i7 also includes a comprehensive maintenance management equipment for preventive maintenance and service request management. The system also provides data logging capabilities to analyze exposure uniformity and stepper performance. It is compatible with various data retrieval sources, including SNF and FabMaster, and provides full support for OIF Laser Writer CHESS standards. Overall, NSR 1755 i7 is a high-precision wafer stepper that is designed to provide superior throughput and focusing accuracy for device fabrication in semiconductor, MEMS, LED, and advanced packaging applications. With its advanced projection optics, user-friendly interface, automated job editor, robot unit, and comprehensive maintenance management machine, this platform is designed to meet the needs of the most demanding production requirements.
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