Used NIKON NSR 1755 i7A #9236936 for sale

Manufacturer
NIKON
Model
NSR 1755 i7A
ID: 9236936
Stepper Resolution: 0.5 NA: 0.5 Exposure wave length: i-Line Reduction: 1/5 Expose field: 17.5 x 17.5 - 13.4 x 20.1 Alignment accuracy: 0.12 (|x|+3s).
NIKON NSR 1755 i7A is a large-scale lithography equipment designed for mass production of integrated circuits. It is a full-field, contaminate-free and environmentally friendlystepper. NIKON NSR 1755I7A can achieve high throughput, high accuracy, and high repeatability in semiconductor device fabrication. NSR-1755I7A utilizes a scan field of 500mm, with a residual scan field deviation (RMS) of 0.5 μm or less. It enables a scan rate of up to 25.3 wafers per hour, while maintaining high resolution and throughput. The effective layer depth of focus (DOF) is greater than 50 μm, and the resist placement flatness is within 0.18 μm. The high resolution achieved by this system allows for up to 0.6 μm of critical dimension variation. It also has an advanced laser overlay alignment unit that provides accuracy of up to 0.1μm for overlay between layers. In addition, the machine is equipped with high-sensitivity laser contamination reduction systems, which enable the throughput and the yield to be increased. This is possible due to the tool's built-in wafer contamination prevention measures that inhibit the possibility of particles entering the lithography asset. It also utilizes advanced, high-precision vibration reduction systems for controlling thermal and electrical effects on the scanning optics and positioning model. This stepper also features a unique double-exposure equipment, di-quad head scanning, and an advanced non-depth-of-focus-dependent scanning system. The double-exposure unit allows for simultaneous processing of opposite sides of the substrate, while the non-depth-of-focus-dependent scanning machine reduces the likelihood of successive photosensitive layers failing due to DOF misalignment. Overall, NIKON NSR-1755 I 7 A stepper is an advanced and reliable photolithography tool that features many of the latest technologies. It provides high throughput, high accuracy, and high repeatability for mass production of integrated circuits. Its advanced design ensures high performance and reliable results for producing a wide range of integrated circuit devices.
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