Used NIKON NSR 1755 i7A #9248848 for sale

NIKON NSR 1755 i7A
Manufacturer
NIKON
Model
NSR 1755 i7A
ID: 9248848
Wafer Size: 6"
Vintage: 1991
Stepper, 6", parts system System: PDP11/73 Hard Disk Drive (HDD) Control rack: Left Wafer stage: 6" Flat Wafer stage screw: Ball screw Wafer alignment: LSA Auto focus: Single point Wafer loader: Type 1 Flat type Cassette (Left and right) Reticle size: 5" Reticle microscope: 15/17.5 mm Reticle loader: Normal No expansion library No PPD No PD Control temperature: LATC and chamber Chamber model: ASAHI (S78) Chamber size: 1500 VT286 Camera control unit Video converter 2 VDA1401A (2) Plates LSA Laser tube LC-SIG4 WGA Laser tube X and Y Ball screw X and Y Motor unit AFINTF (AF68) HEWLETT-PACKARD / AGILENT / KEYSIGHT 5517A Laser head Z Motor unit AF Motor unit CT Unit Pre 1, 2 units Cassette plate Vacuum box (2) Laser power Power supply Fly eyes unit (2) PLC CPU Missing parts 1991 vintage.
NIKON NSR 1755 i7A is a high-precision, next-generation wafer stepper designed to meet the demands of large-scale production lines. Its features provide unsurpassed throughput and tight feature and overlay registration. NIKON NSR 1755I7A is equipped with NIKON patented ultra-high-resolution 9-axis scanning equipment for precise wafer alignment, precise alignment of film chromes, and step and repeat registration accuracy of up to 0.5μm with AE measurement capability. Additionally, its built-in split-optics wafer-stepping system offers a unique feature of overlapping field-of-views to quickly align multiple exposures. NSR-1755I7A is driven by a powerful, Windows-based 7E Controller, featuring a user-friendly interface and versatile pattern generation tools for easy operation and process control. The unit also comes with NIKON i-Vision Software package, which incorporates defect inspection and overlay control capabilities. NIKON NSR 1755 I 7 A incorporates a one-microscope approach, which reduces the number of mechanical parts and simplifies the alignment procedure. This allows for fast exposure times, enabling the machine to produce high-quality images, even at high alignment speeds. Other features of NSR-1755 I 7 A include its multiple-mask alignment tool, which ensures that multiple masks added to the same field can be accurately aligned; its automated stitching mode, which allows compensation of global film warpage; and its filter alignment metrology, which eliminates non-standard patterns for alignment accuracy. In addition, NIKON NSR-1755 I 7 A is highly adaptable to different process environments, featuring configurable immersion fluid levels, multiple chamber configurations, and an optional zoner pressurizer option. Its modular design makes it easier to install and maintain. Overall, NIKON NSR-1755I7A is designed to provide fast throughput and high-precision images with tight registration, accuracy, and overlay control. This wafer stepper is an ideal choice for wafer processing fabrication in large-scale production lines.
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