Used NIKON NSR 1755 i7A #9248848 for sale
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ID: 9248848
Wafer Size: 6"
Vintage: 1991
Stepper, 6", parts system
System: PDP11/73
Hard Disk Drive (HDD)
Control rack: Left
Wafer stage: 6" Flat
Wafer stage screw: Ball screw
Wafer alignment: LSA
Auto focus: Single point
Wafer loader:
Type 1
Flat type
Cassette (Left and right)
Reticle size: 5"
Reticle microscope: 15/17.5 mm
Reticle loader: Normal
No expansion library
No PPD
No PD
Control temperature: LATC and chamber
Chamber model: ASAHI (S78)
Chamber size: 1500
VT286
Camera control unit
Video converter 2
VDA1401A
(2) Plates
LSA Laser tube
LC-SIG4
WGA Laser tube
X and Y Ball screw
X and Y Motor unit
AFINTF (AF68)
HEWLETT-PACKARD / AGILENT / KEYSIGHT 5517A Laser head
Z Motor unit
AF Motor unit
CT Unit
Pre 1, 2 units
Cassette plate
Vacuum box
(2) Laser power
Power supply
Fly eyes unit
(2) PLC CPU
Missing parts
1991 vintage.
NIKON NSR 1755 i7A is a high-precision, next-generation wafer stepper designed to meet the demands of large-scale production lines. Its features provide unsurpassed throughput and tight feature and overlay registration. NIKON NSR 1755I7A is equipped with NIKON patented ultra-high-resolution 9-axis scanning equipment for precise wafer alignment, precise alignment of film chromes, and step and repeat registration accuracy of up to 0.5μm with AE measurement capability. Additionally, its built-in split-optics wafer-stepping system offers a unique feature of overlapping field-of-views to quickly align multiple exposures. NSR-1755I7A is driven by a powerful, Windows-based 7E Controller, featuring a user-friendly interface and versatile pattern generation tools for easy operation and process control. The unit also comes with NIKON i-Vision Software package, which incorporates defect inspection and overlay control capabilities. NIKON NSR 1755 I 7 A incorporates a one-microscope approach, which reduces the number of mechanical parts and simplifies the alignment procedure. This allows for fast exposure times, enabling the machine to produce high-quality images, even at high alignment speeds. Other features of NSR-1755 I 7 A include its multiple-mask alignment tool, which ensures that multiple masks added to the same field can be accurately aligned; its automated stitching mode, which allows compensation of global film warpage; and its filter alignment metrology, which eliminates non-standard patterns for alignment accuracy. In addition, NIKON NSR-1755 I 7 A is highly adaptable to different process environments, featuring configurable immersion fluid levels, multiple chamber configurations, and an optional zoner pressurizer option. Its modular design makes it easier to install and maintain. Overall, NIKON NSR-1755I7A is designed to provide fast throughput and high-precision images with tight registration, accuracy, and overlay control. This wafer stepper is an ideal choice for wafer processing fabrication in large-scale production lines.
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