Used NIKON NSR 1755 i7A #9279743 for sale

Manufacturer
NIKON
Model
NSR 1755 i7A
ID: 9279743
Wafer Size: 6"
Stepper, 6" Wafer type: Flat Wafer loader type: Type I Leveling system: Claw system Arm Main body with chamber Monitor RA Microscope Reticle loader: Mask, 5" Arm Reticle library: Double film 13-Slot s Wafer stage: Chuck, 6" LC Mirror.
NIKON NSR 1755 i7A is a high-end, full-field scanning wafer stepper, specifically designed for use on 300 mm (12-inch) wafers. The scanner has been developed to offer a high level of overlay and CD (critical dimension) accuracy, even at low doses. NIKON NSR 1755I7A is equipped with a 7-inch objective lens and has a two-faced alignment mark recognition equipment, including a quadra-alignment sensor and programmable photodiode array for accurate alignment and registration. An improved camera design delivers improved chromatic aberration control and superior resolution. NSR-1755I7A is equipped with an advanced magnetic flux analysis system, which provides a high level of exposure control and fast alignment of overlays for various lithography processes such as advanced node and memory node. The wafer stepper also features a 'bottom-up' configuration unit, which supports maximum focus as it compensates for the optical and mechanical instabilities encountered with bottom-up exposure. In addition, NIKON NSR 1755 I 7 A also includes a programmable aberration corrector, which provides enhanced depth-of-field control and maintenance for uniform image quality. The device also includes an auto clock skew compensation machine, which optimizes line-end shortening and improves line edge roughness (LER). NIKON NSR-1755I7A adopts a three-zone illumination source, which helps improve throughput performance for enhanced throughput. The scanner also supports the use of non-photoresist mask technologies, including Nanoimprint Lithography (NIL) and X Projection Aligners (XPA). NSR 1755 i7A is ideal for high throughput and low cost lithography applications. It incorporates a wafer color mark to simplify alignment mark recognition, and can be used with a variety of advanced semiconductor films. The device features a design that helps optimize stability, providing conditioned articulations, which minimize movement and eliminate sources of vibration at the edge of the stepper. NSR 1755I7A is ideal for cost-conscious and highly demanding wafer stepper applications. The wafer stepper is backed by a comprehensive and reliable service plan, including NIKON standard warranty on all products as well as 24/7 support available worldwide.
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