Used NIKON NSR 2005 i10C #293587661 for sale

Manufacturer
NIKON
Model
NSR 2005 i10C
ID: 293587661
Vintage: 1995
Stepper 1995 vintage.
NIKON NSR 2005 i10C is a revolutionary wafer stepper that has revolutionized chip production. This step and repeat device functions based on the KLA-Tencor metrology equipment. It utilizes the patented Tapered Immersion Illuminator (TII) which is one of the most precise beam shape, size and position control settings on the market. The stepper's contact-mode scanning capability and 4-dimensional sample data output provides a high level of accuracy. NIKON NSR 2005I10C has two vertically stacked layers of lenses, through which the exponential and falling beam of the TII is directed on the wafer and reticle. The lenses contain a spherical surface that rotates, enabling the light to be bent correctly to produce an image on the wafer. The lenses are also able to adjust their tilt of the light beam, which allows for precise scanning and imaging of patterns onto the wafer. The stepper also features high accuracy demagnification and magnification, with precision of 0.1 micron for the primary focus and 0.05 micron for secondary focus. NSR-2005I10C has a high-efficiency projection lens system, meaning it can run up to 10 stages at an exposure time of only 2.5 seconds. This means the wafer can be exposed to the scanned pattern much faster than with traditional steppers. It also has a high aerial image range, meaning a variety of patterns can be accurately produced at multiple levels of detail. Additionally, the stepper can handle a wide range of reticle sizes, making it suitable for use in a variety of different applications. NIKON NSR-2005I10C is highly reliable, thanks to the reliable metrology unit and its electronic control of the laser power and exposure settings. It also has automatic beam shape, size and position control, which ensures consistent results when using this stepper. The stepper is characterized by low maintenance requirements, with only occasional cleaning and periodic thermal processes to ensure optimal performance. Additionally, the TII machine is extremely energy efficient, keeping energy costs low. In conclusion, NSR 2005I10C is a revolutionary wafer stepper that is able to accurately produce intricate patterns onto a wafer at high speed. It is reliable and low maintenance, and highly efficient, making it cost-effective for chip production.
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