Used NIKON NSR 2005 i10C #293606710 for sale
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ID: 293606710
Stepper
Resolution: 0.45
Reduction: 1/5
NA: 0.57
Exposure wave length: i-Line
Expose field: 22 x 22 - 17.9 x 25.2.
NIKON NSR 2005 i10C is a high-precision, high-performance wafer stepping equipment. Developed by NIKON, it is characterized by its ultra-short exposure time and high throughput. This system is specifically designed to maximize the throughput of large memory and high-speed devices that require an exceptionally fast scan. It includes a deep-UV excimer laser source, high-precision optics, and an integrated direct imaging unit. NIKON NSR 2005I10C leverages its high-speed imaging capability and ultra-short exposure time for a variety of wafer tunneling techniques. Its excellent over-scan accuracy is ideal for precise lithographic processes. With its variable imaging angle, the machine enables more precise control over the etch pattern. The optics of NSR-2005I10C feature an ultra-high NA of 0.75, which provides ultra-high precision and reduced linear distortion. High-dynamic modulation ensures precise overlay accuracy, reducing defects, and improving resolutions of 16 nm or better. The simplified advanced optics design also reduces aberrations, providing precise wafer processing. NIKON NSR-2005 I 10 C is equipped with various features that enhance its performance. The tool has a built-in self-monitoring feature that allows the operator to troubleshoot the asset with ease. Additionally, its auto-focus alignment capabilities provide drastically improved accuracy and repeatability in the focus position. In addition, NSR 2005 I 10 C has a multi-stage scan model that enables rapid scan of a wafer by multiple sets of pattern areas. This equipment is designed for improved utilization of the optics, resulting in increased productivity and throughput. In short, NIKON NSR-2005I10C is an advanced high-quality wafer stepper system designed for precise, reliable, and efficient wafer processing. With its high-speed imaging capability, ultra-short exposure time, and multi-stage scan unit, this machine is perfect for large memory and high-speed device applications. NIKON advanced optics technology ensures precise scanning and improved resolutions. With its various features, it provides high throughput and excellent performance.
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