Used NIKON NSR 2005 i10C #9232572 for sale
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ID: 9232572
Wafer Size: 4"
Vintage: 1995
Stepper, 4"
MCS2 Basic
Option: SMP
Reticle loader
Stage
Operation panel
Wafer loader
Lens controller
Wafer sensor
System: NEST
Hard disk
Storage drive
Illumination type: Normal
Wafer stage:
Chuck type: Flat, 4"
Screw type: Ball
Reticle alignment: VRA, ISS
Reticle microscope: Movable
Wafer alignment: FIA, LSA
Auto focus: Multi
Wafer loader:
Loader type
OF Type: Flat
Flat zone: Flat
In-line: Right
Cassette: Left, Right
Control rack position: Right
Reticle loader: Reticle size, 5"
(13) Slots
No PPD
No barcode system
Chamber type ASAHI
1995 vintage.
NIKON NSR 2005 i10C is a wafer stepper comprised of state-of-the-art optics, sensors and precision scanning technology. It is used mainly in the semiconductor industry to accurately manufacture integrated circuits and other electronic parts. NIKON NSR 2005I10C can accommodate a maximum wafer size of 200mm (7.87-inch) and consists of a multi-function stage, illumination optical equipment and a cutting-edge Feed Forward and Zonal Scanning Algorithm (FWA). The stepper has an exposure Field Size of 30mm x 30mm and an alignment accuracy of 0.75 microns/device. It features an ultra-short wavelength (UV/DUV) illumination than any comparable tool, and an adjustable illuminance control and pattern deforming capability. The optics of NSR-2005I10C consists of an optimized optical system and a high-precision multi-function stage. The optics includes a state-of-the-art double telecentric combined illumination and imaging unit, in which both the object lens and imaging lens are telecentric. This improves resolution and contrast, and provides a wider illuminance field of view. The multi-function stage of NIKON NSR 2005 I 10 C delivers superior flatness, surface accuracy and smoothness to enable fine and precise alignment. It also utilizes a motor with superior torque characteristics to provide superior accuracy and scanning speed. The Zonal Scanning Algorithm (FWA) ensures a high dynamic range imaging for accurate and stable alignment. NIKON NSR-2005 I 10 C is equipped with a high-performance imaging machine that delivers superior resolution, contrast and throughput. It utilizes a variety of sensors and image-processing algorithms to ensure a high-speed and highly accurate image capturing. The tool is capable of processing sub-pixel patterns, ensuring highly accurate pattern placement. NSR 2005 I 10 C is designed to provide superior performance for challenging and diversified production requirements. Its feature-rich asset design makes it highly reliable and allows for improved process flexibility and scalability. The stepper is ideal for highly advanced integrated circuit production and offers superior cost effectiveness.
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